Physics of Outgassing

نویسنده

  • J. L. de Segovia
چکیده

This paper relates the physical bases of the gassing phenomena in ultra-high vacuum. The main phenomena discussed are: diffusion of gases through system walls and solids in vacuum, solubility of gases on solids and permeation as well as the phenomena of adsorption, desorption and absorption.

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تاریخ انتشار 1999